Zhiyun Han
材料科学技术（英）
In this paper, Me (Me=Cr, Zr) and N co-doped diamond like carbon (DLC-MeN) composite films were prepared on cemented carbide substrates by pulsed bias arc ion plating. The effect of nitrogen flow rates on the microstructure and properties of the films were investigated by X-ray photoelectron spectroscopy (XPS), Raman spectra, grazing incident X-ray diffraction (GIXRD), high resolution transmission electron microscopy (HRTEM) and nano-indentation. Raman, GIXRD and HRTEM results show that the deposited films are nanocomposite films with MeN nanocrystalline phase embedded within DLC amorphous matrix, which are vital for the mechanical properties of the films. The nitrogen flow rate has significant effect on the compositions and structures and hence on the hardness and elastic modulus of the films, and increasing nitrogen flow rate decreases drastically the hardness and elastic modulus of the films.
关键词:
Diamond like carbon films
,
doping
,
Nitrogen flow rate
,
Arc ion plating
于斌斌
,
袁军堂
,
汪振华
,
胡小秋
,
王飞
新型炭材料
利用阳极离子束技术在SKD11型不锈钢和YG6硬质合金上沉积类金刚石( DLC)薄膜,采用扫描电子显微镜、原子力显微镜、Raman光谱分析薄膜微观结构和表面形貌；采用WS-2005型附着力划痕仪和洛氏压力机测试膜基结合强度；采用球磨仪测试膜层耐磨性能。结果表明：利用该技术所制DLC膜是一种非晶结构、表面平整的薄膜,粗糙度Ra 值仅为5.21nm。DLC/Cr/SKD11膜系Raman光谱ID/IG值(0.69)高于DLC/Cr/YG6膜系(1.54),说明SKD11高于YG6所制膜层的sp3C键含量；DLC/Cr/SKD11膜系结合强度(17.8 N)低于DLC/Cr/YG6膜系(39.2 N),且DLC/Cr/YG6膜系的洛氏压痕周围仅有放射状微细裂纹,而DLC/Cr/SKD11膜系的压痕周围存在膜层脱落现象；沉积在SKD11与YG6基体上DLC膜的单位磨损率分别为1.40E-4和8.81E-5,说明YG6基体上DLC膜层的耐磨性要优于SKD11基体上的DLC膜层。由此看出,不同基体上制备的DLC膜层微观结构不同,导致结合性能及耐磨性能不同。
关键词:
阳极离子束技术
,
类金刚石膜
,
结合强度
,
耐磨性
